Patent · US Active

System for separately handling different size FOUPs

US9142437B2 · kind B2 · utility

448Cited by

7References

16Claims

0Family size

Assignee

GlobalFoundries Inc. · KY

Inventors

William J. Fosnight · Windham, US
Ryan John Gallagher · Huntersville, US
Stephen B. Miner · Gansevoort, US

Key dates

Filing date	Apr 10, 2013
Grant date	Sep 22, 2015
Priority date	—
Expiry date	Aug 29, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67379
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A system for separately handling different size FOUPs includes an end effector having a surface thereon for supporting a FOUP. The end effector and surface is configured to support different size FOUPs. A fixture or means for engaging and maintaining a FOUP, of different size FOUPs, included to position and maintain each of a different size FOUP on the end effector during transport thereof. A shelf is configured to receive each of said different size FOUPs. The end effector is thus capable of transporting either a first size FOUP or a second, smaller size FOUP.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.