Atomic force microscopy of scanning and image processing
US9150415B2 · kind B2 · utility
5Cited by
12References
13Claims
0Family size
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Key dates
| Filing date | Jul 25, 2008 |
| Grant date | Oct 6, 2015 |
| Priority date | — |
| Expiry date | Aug 31, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A topographic profile of a structure is generated using atomic force microscopy. The structure is scanned such that an area of interest of the structure is scanned at a higher resolution than portions of the structure outside of the area of interest. An profile of the structure is then generated based on the scan. To correct skew and tilt of the profile, a first feature of the profile is aligned with a first axis of a coordinate system. The profile is then manipulated to align a second feature of the profile with a second axis of the coordinate system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.