Two way gate valve and substrate processing system having the same
US9151393B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 17, 2012 |
| Grant date | Oct 6, 2015 |
| Priority date | — |
| Expiry date | Apr 30, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67126
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A two way gate valve includes a valve chamber having a first entrance coupled with a first chamber, a second entrance coupled with a second chamber, and an openable and closable chamber cover; a moving module having a first sealing plate for sealing the first entrance, a second sealing plate for sealing the second entrance, and a moving module body to which the first and the second sealing plates are mounted; a push-pull module having a push-pull module body coupled with the moving module body such that the moving module body can linearly move, a first operating body for moving the moving module in a first entrance direction such that the first sealing plate seals the first entrance, and a second operating body for moving the moving module in a second entrance direction such that the second sealing plate seals the second entrance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.