Optical inspection system with a variation system consisting of five lens groups for imaging an object into infinity

US9151936B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Rolf Wartmann · Bösinghausen, DE
• Kerstin Winkler · Göttingen, DE
• Joerg Sprenger · Jena, DE

Key dates

• Filing date: Nov 7, 2011
• Grant date: Oct 6, 2015
• Expiry date: Apr 17, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/22
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention relates to an optical inspecting system designed to image an object to be inspected with a variable imaging scale, comprising a variation system for imaging the object into infinity, a lens group downstream of the variation system for imaging the object from infinity into the image plane of the whole system, and a light source for generating light in order to illuminate the object, means for imaging the illuminating light into the exit pupil of the variation system being provided in the airspace between the fifth lens group and the subsequent lens group. Of the five lens groups of the variation system, the first, second, and fourth lens groups, when seen in the imaging direction, are arranged in a movable manner in the direction of the optical axis, whereas the third and fifth lens groups are not movable.