Branched siloxanes and methods for synthesis
US9156863B2 · kind B2 · utility
1Cited by
4References
3Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 16, 2011 |
| Grant date | Oct 13, 2015 |
| Priority date | — |
| Expiry date | Feb 20, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/31055
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithography, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.