Closed-space annealing of chalcogenide thin-films with volatile species
US9157153B2 · kind B2 · utility
2Cited by
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23Claims
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Key dates
| Filing date | May 9, 2012 |
| Grant date | Oct 13, 2015 |
| Priority date | — |
| Expiry date | Oct 4, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In one embodiment, a method includes depositing a chalcogenide precursor layer onto a substrate, introducing a cover into proximity with the precursor layer, and annealing the precursor layer in proximity with of the cover, where the annealing is performed in a constrained volume, and where the presence of the cover reduces decomposition of volatile species from the precursor layer during annealing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.