Inventor · Fremont, CA, US

Amith Kumar Murali

4Patents
2h-index
7Co-inventors
33Inventor score

Filing activity: Apr 22, 2005 → May 9, 2012

Most-cited inventions

PatentTitleAreaCited byStatus
US7479191B1 Method for endpointing CVD chamber cleans following ultra low-k film treatments Chemistry; Metallurgy 11 Active
US9238861B2 Closed-space annealing process for production of CIGS thin-films Emerging Cross-Sectional Technologies 3 Active
US9157153B2 Closed-space annealing of chalcogenide thin-films with volatile species Emerging Cross-Sectional Technologies 2 Active
US8993370B2 Reverse stack structures for thin-film photovoltaic cells Emerging Cross-Sectional Technologies 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.