Patent · US Active

Method and system to compensate for temperature and pressure in piezo resistive devices

US9157826B2 · kind B2 · utility

2Cited by

12References

7Claims

0Family size

Assignee

Freeescale Semiconductor, Inc. · US

Inventors

Siddhartha Gopal Krishna · New Delhi, IN
Chad S. Dawson · Queen Creek, US
Vikram Varma · Bengaluru, IN

Key dates

Filing date	Mar 5, 2014
Grant date	Oct 13, 2015
Priority date	—
Expiry date	Jul 1, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01L27/002
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method and system to calibrate temperature and pressure in piezo resistive devices for non-linear sensors having two variables, where a piezo resistive device such as a piezo resistive transducer (PRT) used for example in a pressure sensor system is calibrated to calculate actual/ambient temperature and pressure even though the PRT impedance is unbalanced relative to pressure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.