Multilayer electronic structure with stepped holes
US9161461B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 14, 2012 |
| Grant date | Oct 13, 2015 |
| Priority date | — |
| Expiry date | Mar 23, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A multilayer electronic structure comprising a plurality of layers extending in an X-Y plane consisting of a dielectric material surrounding metal via posts that conduct in a Z direction perpendicular to the X-Y plane, wherein at least one multilayered hole crosses at least two layers of the plurality of layers and comprises at least two hole layers in adjacent layers of the multilayer composite electronic structure, wherein the at least two holes in adjacent layers have different dimensions in the X-Y plane, such that a perimeter of the multilayered hole is stepped and where at least one hole is an aperture to a surface of the multilayer electronic structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.