Patterning nano-scale patterns on a film comprising unzipping copolymers
US9164376B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 9, 2012 |
| Grant date | Oct 20, 2015 |
| Priority date | — |
| Expiry date | May 11, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24355
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The invention concerns a method for patterning a surface of a material. A substrate having a polymer film thereon is provided. The polymer is a selectively reactive polymer (e.g., thermodynamically unstable): it is able to unzip upon suitable stimulation. A probe is used to create patterns on the film. During the patterning, the film is locally stimulated for unzipping polymer chains. Hence, a basic idea is to provide a stimulus to the polymeric material, which in turn spontaneously decomposes e.g., into volatile constituents. For example, the film is thermally stimulated in order to break a single bond in a polymer chain, which is sufficient to trigger the decomposition of the entire polymer chain.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.