Hardmask surface treatment
US9171720B2 · kind B2 · utility
3Cited by
7References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 19, 2013 |
| Grant date | Oct 27, 2015 |
| Priority date | — |
| Expiry date | Nov 17, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/3105
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Methods of treating the surface of a metal-containing hardmask used in the manufacture of semiconductors by contacting the hardmask surface with a composition capable of adjusting the water contact angle so as to substantially match that of subsequently applied organic coatings are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.