Area efficient series MIM capacitor

US9171897B1 · kind B1 · utility

Assignee

• Altera Corporation · US

Inventors

• Queennie Suan Imm Lim · Santa Clara, US
• Dale E. Ibbotson · Pleasanton, US

Key dates

• Filing date: Jul 8, 2013
• Grant date: Oct 27, 2015
• Expiry date: Jan 21, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/692

Abstract

Two series-connected metal-insulator-metal (MIM) capacitors are disclosed that are suitable for fabrication in the back-end structure of an integrated circuit. The MIM capacitors have first and second electrically conducting plates on a first insulating layer, third and fourth electrically conducting plates overlapping the first and second conducting plates, a second insulating layer between the first and third conducting plates and between the second and fourth conducting plates, a blind via coupling the first and fourth conducting plates, and connections to the second and third conducting plates. Methods of fabricating such series-connected MIM capacitors are also disclosed.