Dale E. Ibbotson
12Patents
8h-index
18Co-inventors
69Inventor score
Filing activity: Oct 1, 1982 → Jul 8, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4918031A | Processes depending on plasma generation using a helical resonator | Emerging Cross-Sectional Technologies | 178 | Expired |
| US4498953A | Etching techniques | Emerging Cross-Sectional Technologies | 166 | Expired |
| US5654903A | Method and apparatus for real time monitoring of wafer attributes in a plasma etch process | Physics | 100 | Expired |
| US5653894A | Active neural network determination of endpoint in a plasma etch process | Electricity | 44 | Expired |
| US5494697A | Process for fabricating a device using an ellipsometric technique | Electricity | 32 | Expired |
| US4397711A | Crystallographic etching of III-V semiconductor materials | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5877407A | Plasma etch end point detection process | Physics | 11 | Expired |
| US4960656A | Devices and process for producing devices containing silicon nitride films | Electricity | 8 | Expired |
| US4689115A | Gaseous etching process | Electricity | 6 | Expired |
| US7883946B1 | Angled implantation for deep submicron device optimization | Electricity | 1 | Active |
| US8519403B1 | Angled implantation for deep submicron device optimization | Electricity | 0 | Active |
| US9171897B1 | Area efficient series MIM capacitor | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.