Pressure sensor having multiple pressure cells and sensitivity estimation methodology
US9176020B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 1, 2013 |
| Grant date | Nov 3, 2015 |
| Priority date | — |
| Expiry date | Jan 16, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L27/002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor (20) includes a test cell (32) and sense cell (34). The sense cell (34) includes an electrode (42) formed on a substrate (30) and a sense diaphragm (68) spaced apart from the electrode (42) to produce a sense cavity (64). The test cell (32) includes an electrode (40) formed on the substrate (30) and a test diaphragm (70) spaced apart from the electrode (40) to produce a test cavity (66). Both of the cells (32, 34) are sensitive to pressure (36). However, a critical dimension (76) of the sense diaphragm (68) is less than a critical dimension (80) of the test diaphragm (70) so that the test cell (32) has greater sensitivity (142) to pressure (36) than the sense cell (34). Parameters (100) measured at the test cell (32) are utilized to estimate a sensitivity (138) of the sense cell (34).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.