Carbon nanotube-graphene hybrid transparent conductor and field effect transistor
US9177688B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 22, 2011 |
| Grant date | Nov 3, 2015 |
| Priority date | — |
| Expiry date | Nov 22, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A nanotube-graphene hybrid film and method for forming a cleaned nanotube-graphene hybrid film. The method includes depositing nanotube film over a substrate to produce a layer of nanotube film, removing impurities from a surface of the layer of nanotube film not contacting the substrate to produce a cleaned layer of nanotube film, depositing a layer of graphene over the cleaned layer of nanotube film to produce a nanotube-graphene hybrid film, and removing impurities from a surface of the nanotube-graphene hybrid film to produce a cleaned nanotube-graphene hybrid film, wherein the hybrid film has improved electrical performance. Another method includes depositing nanotube film over a metal foil to produce a layer of nanotube film, placing the metal foil with as-deposited nanotube film in a chemical vapor deposition furnace to grow graphene on the nanotube film to form a nanotube-graphene hybrid film, and transferring the nanotube-graphene hybrid film over a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.