Patent · US Active

Method for fabricating a coil by way of a rounded trench

US9183977B2 · kind B2 · utility

8Cited by

8References

16Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Markus Menath · Regensburg, DE
Thomas Fischer · Umkirch, DE
Hermann Wendt · Grasbrunn, DE

Key dates

Filing date	Apr 20, 2012
Grant date	Nov 10, 2015
Priority date	—
Expiry date	Apr 20, 2032

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/4902
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method for manufacturing an electronic device and an electronic device are disclosed. In an embodiment the method comprises forming an opening in an isolation layer, isotropically etching the opening thereby forming an extended opening with curved sidewalls, and forming a conductive material in the opening.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.