Electrostatic chuck
US9184081B2 · kind B2 · utility
0Cited by
13References
17Claims
0Family size
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Key dates
| Filing date | Apr 24, 2013 |
| Grant date | Nov 10, 2015 |
| Priority date | — |
| Expiry date | Oct 22, 2033 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2235/9669
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Each of electrostatic chucks 1A to 1F includes a susceptor 11A having an adsorption face 11a of adsorbing a semiconductor, and an electrostatic chuck electrode 4 embedded in the susceptor. The susceptor includes a plate shaped main body 3 and a surface corrosion resistant layer 2 including the adsorption face 2. The surface corrosion resistant layer 2 is made of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising MgO—AlN solid solution wherein aluminum nitride is dissolved into magnesium oxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.