Backside alignment apparatus and method
US9188434B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2011 |
| Grant date | Nov 17, 2015 |
| Priority date | — |
| Expiry date | Jun 11, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7088
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A backside alignment apparatus and method for determining a position relationship between a substrate (6) and a workpiece stage (24). The backside alignment apparatus includes: an illumination apparatus (1) for emanating infrared light; a workpiece stage assembly (2) for supporting and moving the substrate (6); an imaging apparatus (3) for detecting alignment marks and calculating positions of the alignment marks, the alignment marks including a reference plate alignment mark (41) and a backside alignment mark (20); and a reference plate assembly (4) for setting up a relationship between position coordinates of the imaging apparatus (3) and the workpiece stage assembly (2). The illumination apparatus (1) and the imaging apparatus (3) are able to illuminate and align different alignment marks using only one set of illumination apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.