Yuefei Chen
3Patents
1h-index
8Co-inventors
33Inventor score
Filing activity: Dec 20, 2011 → Mar 31, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9188434B2 | Backside alignment apparatus and method | Physics | 2 | Active |
| US10197923B2 | Exposure device and out-of-focus and tilt error compensation method | Electricity | 0 | Active |
| US10585361B2 | Projection exposure apparatus and method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.