Patent · US Active

Semiconductor device and method of fabricating the same

US9190404B2 · kind B2 · utility

8Cited by
1References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 24, 2013
Grant dateNov 17, 2015
Priority date
Expiry dateFeb 25, 2034

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Provided are a semiconductor device and a method of fabricating the same. The device may include a transistor on a substrate comprising a gate insulating pattern, a gate electrode and an impurity region, a shared contact plug electrically connected to the gate electrode and the impurity region, and an etch-stop layer between side surfaces of the gate electrode and the shared contact. The shared contact plug may include a first conductive pattern electrically connected to the first impurity region and a second conductive pattern electrically connected to the gate electrode, and a top surface of the first conductive pattern may be higher than a top surface of the gate electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.