Patent · US Active

Device and method for reducing a wedge error

US9194700B2 · kind B2 · utility

22Cited by

1References

9Claims

0Family size

Assignee

EV GROUP E. THALLNER GMBH · AT

Inventors

Michael Kast · Wels, AT
Christian Grünseis · Ried im Innkreis, AT
Alois Malzer · Ried im Innkreis, AT

Key dates

Filing date	Sep 3, 2010
Grant date	Nov 24, 2015
Priority date	—
Expiry date	Dec 13, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/0002
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A device for aligning a first surface of a first substrate with a second surface of a second substrate as the first and the second surfaces move toward each other across a gap. The device is comprised of:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.