Patent assignee · AT · COMPANY

EV GROUP E. THALLNER GMBH

174Patents
174Active
174Granted
60Portfolio score

Filing activity: Nov 7, 2008 → Dec 19, 2022 · 10 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US9194700B2 Device and method for reducing a wedge error Physics 22 Active
US8640548B2 Apparatus, device and method for determining alignment errors Electricity 21 Active
US9312161B2 Accommodating device for retaining wafers Electricity 19 Active
US9296193B2 Bendable carrier mount, device and method for releasing a carrier substrate Emerging Cross-Sectional Technologies 17 Active
US9613840B2 Apparatus and method for bonding substrates Emerging Cross-Sectional Technologies 11 Active
US9640510B2 Method for bonding metallic contact areas with solution of a sacrificial layer applied on one of the contact areas Electricity 9 Active
US10024741B2 Measuring device and method for ascertaining a pressure map Physics 9 Active
US10109487B2 Method for bonding substrates Electricity 8 Active
US9418882B2 Device and method for aligning substrates Electricity 6 Active
US8975158B2 Method for permanently bonding wafers Electricity 6 Active
US9576825B2 Device for alignment of two substrates Electricity 6 Active
US9067363B2 Method and device for permanent bonding of wafers, as well as cutting tool Emerging Cross-Sectional Technologies 6 Active
US9851645B2 Device and method for aligning substrates Electricity 6 Active
US10279575B2 Device and method for bonding substrates Emerging Cross-Sectional Technologies 6 Active
US10325798B2 Accommodating device for retaining wafers Electricity 6 Active
US10008424B2 Measuring device and method for measuring layer thicknesses and defects in a wafer stack Electricity 6 Active
US11282706B2 Device and method for bonding of substrates Electricity 5 Active
US9859246B2 Method for bonding substrates Electricity 5 Active
US9707650B2 System and method for machining a workpiece Emerging Cross-Sectional Technologies 5 Active
US9666470B2 Receptacle device, device and method for handling substrate stacks Electricity 4 Active
US10388545B2 Device for alignment of two substrates Electricity 4 Active
US10438822B2 Method for prefixing of substrates Electricity 3 Active
US10943807B2 Method and device for alignment of substrates Electricity 3 Active
US10964562B2 Device and method for bonding of two substrates Electricity 3 Active
US9159717B2 Method for permanently bonding wafers Electricity 3 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.