Patent · US Active

Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter

US9195152B2 · kind B2 · utility

1Cited by

4References

6Claims

0Family size

Assignee

ASML NETHERLANDS B.V. · NL

Inventors

Wouter Anthon Soer · Nijmegen, NL
Andrei Mikhailovich Yakunin · Mierlo, NL
Martin Jacobus Johan Jak · 's-Hertogenbosch, NL
Denny Mathew · Eindhoven, NL
Hendrik Jan Kettelarij · Eindhoven, NL
Fredericus Christiaan Van Den Heuvel · Waalre, NL
Petrus Elizabeth Maria Kuijpers · Bergeijk, NL

Key dates

Filing date	Aug 26, 2009
Grant date	Nov 24, 2015
Priority date	—
Expiry date	Jan 22, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG21K2201/061
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A transmissive spectral purity filter is configured to transmit extreme ultraviolet radiation. The spectral purity filter includes a filter part having a plurality of apertures configured to transmit extreme ultraviolet radiation and to suppress transmission of a second type of radiation. Each aperture has been manufactured by an anisotropic etching process.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.