Processing liquid for suppressing pattern collapse of fine metal structure, and method for producing fine metal structure using same
US9196472B2 · kind B2 · utility
2Cited by
7References
16Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 21, 2010 |
| Grant date | Nov 24, 2015 |
| Priority date | — |
| Expiry date | Dec 15, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C1/00928
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
There are provided a processing liquid that is capable of suppressing pattern collapse of a fine metal structure, such as a semiconductor device and a micromachine, and a method for producing a fine metal structure using the same. The processing liquid for suppressing pattern collapse of a fine metal structure, contains a phosphate ester and/or a polyoxyalkylene ether phosphate ester, and the method for producing a fine metal structure, uses the same.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.