Focus ring and manufacturing method therefor
US9196512B2 · kind B2 · utility
2Cited by
5References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 22, 2011 |
| Grant date | Nov 24, 2015 |
| Priority date | — |
| Expiry date | Apr 6, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68735
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
There is provided a focus ring capable of preventing a part of a heat transfer sheet from adhering to and remaining on a mounting table. The focus ring is arranged to surround a periphery of a substrate mounted on the mounting table having a temperature control device. Further, the focus ring includes a flexible heat transfer sheet. Furthermore, the focus ring is in contact with the mounting table via the heat transfer sheet, and the heat transfer sheet has a contact surface in contact with the mounting table and an anti-adhesion layer formed on the contact surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.