Extreme ultraviolet light generation apparatus
US9198273B2 · kind B2 · utility
2Cited by
1References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 23, 2014 |
| Grant date | Nov 24, 2015 |
| Priority date | — |
| Expiry date | Jul 23, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K5/10
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
An apparatus for generating extreme ultraviolet light may include a reference member, a chamber fixed to the reference member, the chamber including at least one window, a laser beam introduction optical system configured to introduce an externally supplied laser beam into the chamber through the at least one window, and a positioning mechanism configured to position the laser beam introduction optical system to the reference member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.