Film forming apparatus, film forming method, method for optimizing rotational speed, and storage medium
US9200364B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 18, 2011 |
| Grant date | Dec 1, 2015 |
| Priority date | — |
| Expiry date | Feb 20, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/52
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A film forming apparatus for forming a film on an object includes: a processing container; gas supply means, having gas jet ports, respectively; a holding means for holding the object; a drive mechanism for moving the holding means relative to the gas jet ports; and a control means which, when repeating P times a cycle, consisting of a supply period for supplying a gas and a supply stop period during which the supply of the gas is stopped, performs control so that as viewed from the center of the object, a gas supply starting position is sequentially shifted in the circumferential direction of the object for every cycle in such a manner that the entire circumference of the object to be processed is divided into K segments (K=P), K being an arbitrary division number, and the gas supply starting position is shifted by one segment for every cycle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.