Method and apparatus for ellipsometry measurement
US9200998B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 3, 2009 |
| Grant date | Dec 1, 2015 |
| Priority date | — |
| Expiry date | Feb 11, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/274
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and systems are provided to avoid the rotation action with the polarizer and the analyzer in complex ellipsometric measurement and repeated processes. In particular, methods and systems are provided which polarize the incident light in a fixed azimuthal angle then illuminate the polarized light onto the target surface, analyze the surface polarized characteristics light in a fixed azimuthal angle, and obtain the light intensity and phase information corresponding to the target surface. Then, based on the relationship between the characteristic information detected by electromagnetic wave and the light intensity information, the disclosed methods and systems obtain the characteristic information of the target surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.