Electrostatic chuck
US9202718B2 · kind B2 · utility
2Cited by
12References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 17, 2013 |
| Grant date | Dec 1, 2015 |
| Priority date | — |
| Expiry date | Sep 14, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24942
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An electrostatic chuck 1A includes a susceptor 11A having an adsorption face 11a of adsorbing a semiconductor, and an electrostatic chuck electrode 4 embedded in the susceptor. The susceptor 11A includes a plate shaped main body 3 and a surface corrosion resistant layer 2 including the adsorption face 2. The surface corrosion resistant layer 2 is made of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2θ=47 to 50° by CuKα X-ray.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.