Mass flow control monitoring
US9207139B2 · kind B2 · utility
14Cited by
3References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 24, 2012 |
| Grant date | Dec 8, 2015 |
| Priority date | — |
| Expiry date | Jan 22, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F17/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of monitoring a Mass Flow Controller (MFC) connected to a pressure chamber for supplying gas to the chamber, which is an unpumped condition, includes cyclically switching the MFC to create successive fill cycles for a test period and measuring the chamber pressure at intervals during the test period. The method is characterised in that the total switch time of the MFC is at least 10% of the fill cycle and in that the method includes obtaining the average of the pressure measurements and comparing them with historical data to determine whether or not the MFC is functioning properly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.