Metal-oxide-metal capacitor structure
US9209240B2 · kind B2 · utility
0Cited by
8References
12Claims
0Family size
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Key dates
| Filing date | Feb 21, 2013 |
| Grant date | Dec 8, 2015 |
| Priority date | — |
| Expiry date | Feb 21, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A capacitor from a Metal-Oxide-Metal (“MoM”) process may include a plurality of metal layers arranged with different design structures. The metal layers may be connected with vias. The metal layers may include wires, such as rows and/or fingers that are arranged for maximizing capacitance between adjacent fingers, as well as between fingers of different metal layers. As the spacing of the fingers is increased, the reliability, yield of final product, and ease of manufacturing both increase. The capacitor increases the spacing of wires/fingers while either maintaining or improving the capacitance per unit area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.