Patent · US Active

Microelectromechanical resonators

US9209778B2 · kind B2 · utility

0Cited by

8References

11Claims

0Family size

Assignee

Infineon Technologies Dresden GmbH & Co. KG · DE

Inventors

Thoralf Kautzsch · Dresden, DE
Heiko Froehlich · Radebeul, DE
Mirko Vogt · Dresden, DE
Maik Stegemann · Freital, DE
Thomas Santa · Seeboden, AT
Markus Burian · Villach, AT

Key dates

Filing date	Mar 15, 2013
Grant date	Dec 8, 2015
Priority date	—
Expiry date	Dec 10, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH03H2009/02496
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

Embodiments relate to MEMS resonator structures and methods that enable application of a maximum available on-chip voltage. In an embodiment, a MEMS resonator comprises a connection between a ground potential and the gap electrode of the resonator. Embodiments also relate to manufacturing systems and methods that are less complex and enable production of MEMS resonators of reduced dimensions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.