Heiko Froehlich
31Patents
2h-index
27Co-inventors
53Inventor score
Filing activity: Dec 20, 2012 → Aug 3, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9382111B2 | Micromechanical system and method for manufacturing a micromechanical system | Performing Operations; Transporting | 10 | Active |
| US9938133B2 | System and method for a comb-drive MEMS device | Performing Operations; Transporting | 8 | Active |
| US10870575B2 | Stressed decoupled micro-electro-mechanical system sensor | Electricity | 2 | Active |
| US9887355B2 | Emitter and method for manufacturing the same | Physics | 1 | Active |
| US10684306B2 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Physics | 1 | Active |
| US9376314B2 | Method for manufacturing a micromechanical system | Physics | 1 | Active |
| US11428661B2 | Method for producing a moisture sensor at the wafer level and moisture sensor | Electricity | 1 | Active |
| US10683203B2 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Performing Operations; Transporting | 1 | Active |
| US10681777B2 | Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures | Electricity | 1 | Active |
| US11422151B2 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Physics | 1 | Active |
| US9641153B2 | Method of forming a resonator | Electricity | 0 | Active |
| US11719662B2 | Moisture sensor | General | 0 | Revoked |
| US9209778B2 | Microelectromechanical resonators | Electricity | 0 | Active |
| US9452923B2 | Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region | Performing Operations; Transporting | 0 | Active |
| US10060816B2 | Sensor structures, systems and methods with improved integration and optimized footprint | Performing Operations; Transporting | 0 | Active |
| US11015980B2 | Infrared radiation sensors and methods of manufacturing infrared radiation sensors | Electricity | 0 | Active |
| US11486848B2 | Moisture sensor | Physics | 0 | Active |
| US10544037B2 | Integrated semiconductor device and manufacturing method | Performing Operations; Transporting | 0 | Active |
| US11078072B2 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Performing Operations; Transporting | 0 | Active |
| US11239375B2 | Method for manufacturing a pressure sensitive field effect transistor including a membrane structure | Electricity | 0 | Active |
| US10084101B2 | Graded-index structure for optical systems | Electricity | 0 | Active |
| US9663355B2 | Method and structure for creating cavities with extreme aspect ratios | Performing Operations; Transporting | 0 | Active |
| US9752943B2 | Sensor structures, systems and methods with improved integration and optimized footprint | Performing Operations; Transporting | 0 | Active |
| US10386255B2 | Pressure sensor device and manufacturing method | Physics | 0 | Active |
| US10347778B2 | Graded-index structure for optical systems | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.