Active lateral force stiction self-recovery for microelectromechanical systems devices
US9213045B2 · kind B2 · utility
1Cited by
3References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 23, 2013 |
| Grant date | Dec 15, 2015 |
| Priority date | — |
| Expiry date | Apr 2, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0235
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A mechanism for recovering from stiction-related events in a MEMS device through application of a force orthogonal to the stiction force is provided. A small force applied orthogonal to the vector of a stiction force can release the stuck proof mass easier than a force parallel to the vector of the stiction force. Example embodiments provide a vertical parallel plate or comb-fingered lateral actuator to apply the orthogonal force. Alternate embodiments provide a proof mass of a second transducer to impact a stuck MEMS actuator to release stiction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.