Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode

US9213047B2 · kind B2 · utility

Assignee

• Bruker Nano, Inc. · US

Inventors

• Chunzeng Li · Goleta, US
• Yan Hu · Zhejiang, CN
• Ji Ma · Kirkland, US
• Jianli He · Houston, US
• Lin Huang · Changhua City, TW
• Stephen C. Minne · Danville, US
• Henry Mittel · Lompoc, US
• Weijie Wang · Nanhu, CN
• Shuiqing Hu · Lompoc, US
• Chanmin Su · Ventura, US

Key dates

• Filing date: Jun 24, 2013
• Grant date: Dec 15, 2015
• Expiry date: Nov 19, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q60/34
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.