Patent · US Active

Semiconductor device having transparent electrodes

US9214533B2 · kind B2 · utility

7Cited by
9References
16Claims
0Family size

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Key dates

Filing dateJan 24, 2013
Grant dateDec 15, 2015
Priority date
Expiry dateJan 24, 2033

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

This semiconductor device (100A) includes: a substrate (2); a gate electrode (3) formed on the substrate (2); a gate insulating layer (4) formed over the gate electrode (3); an oxide semiconductor layer (5) formed on the gate insulating layer (4); source and drain electrodes (6s, 6d) electrically connected to the oxide semiconductor layer (5); a first transparent electrode (7) electrically connected to the drain electrode (6d); an interlayer insulating layer (8) including a dielectric layer (8a) formed over the source and drain electrodes (6s, 6d); and a second transparent electrode (9) formed on the interlayer insulating layer (8). At least a portion of the second transparent electrode (9) overlaps with the first transparent electrode (7) with the dielectric layer (8a) interposed between them, and the oxide semiconductor layer (5) and the first transparent electrode (7) are formed out of the same oxide film.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.