System for protecting light optical components during laser ablation
US9216475B2 · kind B2 · utility
1Cited by
11References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 27, 2013 |
| Grant date | Dec 22, 2015 |
| Priority date | — |
| Expiry date | Nov 22, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2103/50
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method and apparatus to perform laser ablation in the vicinity of a charged particle beam while simultaneously protecting the light optical components of the apparatus utilized to perform the ablation from being coated with debris resulting from the ablation process. According to preferred embodiments of the present invention, a protective transparent screen is used to shield the laser optical components. A preferred screen could be replaced or repositioned without breaking vacuum in the sample chamber and would not be particularly susceptible to undesirable charging effects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.