Spatial light modulation elements, method for manufacturing same, and spatial light modulators and exposure apparatus comprising same
US9217860B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 19, 2014 |
| Grant date | Dec 22, 2015 |
| Priority date | — |
| Expiry date | Feb 19, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49885
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided is a spatial light modulation element comprising a substrate; a flat portion that is movable relative to the substrate; a flat board attached to the flat portion; and a dielectric film that is formed on a surface of the flat board opposite the surface on which the flat portion is attached, and reflects incident light. In the spatial light modulation element the dielectric film may include two or more types of dielectric layers that are repeatedly layered in an alternating manner, such that adjacent layers have different refractive indexes from each other. Furthermore, the dielectric film may be formed by alternately layering an Al2O3 film and a SiO2 film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.