Salt and photoresist composition containing the same
US9221785B2 · kind B2 · utility
1Cited by
4References
6Claims
0Family size
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Key dates
| Filing date | Jun 9, 2010 |
| Grant date | Dec 29, 2015 |
| Priority date | — |
| Expiry date | May 15, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/38
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A salt having a group represented by the formula (I):-T (I)wherein T represents a C3-C36 alicyclic hydrocarbon group in which at least two methylene groups are replaced by —O— or —S— and which can have one or more substituents.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.