Patent · US Active

Damping device for a micromechanical sensor device

US9222955B2 · kind B2 · utility

4Cited by
2References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 1, 2013
Grant dateDec 29, 2015
Priority date
Expiry dateMar 26, 2034

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/4913
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A damping device for a micromechanical sensor device, having at least one first intermediate layer having at least two sections, a second section being situated around a first section, a lateral distance being provided between the first and the second section, and an elastic device being provided between the first section and the second section as an integral part of the first intermediate layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.