Damping device for a micromechanical sensor device
US9222955B2 · kind B2 · utility
4Cited by
2References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 1, 2013 |
| Grant date | Dec 29, 2015 |
| Priority date | — |
| Expiry date | Mar 26, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4913
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A damping device for a micromechanical sensor device, having at least one first intermediate layer having at least two sections, a second section being situated around a first section, a lateral distance being provided between the first and the second section, and an elastic device being provided between the first section and the second section as an integral part of the first intermediate layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.