Method of automatic fluid dispensing for imprint lithography processes

US9223202B2 · kind B2 · utility

Assignee

• The Board of Regents of the University of Texas System · US

Inventors

• Byung-Jin Choi · Round Rock, US
• Sidlgata V. Sreenivasan · Austin, US
• Carlton G. Willson · Austin, US
• Mattherw E. Colburn · Hopewell Junction, US
• Todd C. Bailey · Poughkeepsie, US
• John Ekerdt · Austin, US

Key dates

• Filing date: Jul 9, 2007
• Grant date: Dec 29, 2015
• Expiry date: May 28, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/1461
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Disclosed herein is an automatic fluid dispensing method and system for dispensing fluid on the surface of a plate-like material, or substrate, including a semiconductor wafer for imprint lithography processes. The dispensing method uses fluid dispenser and a substrate stage that may generate relative lateral motions between a fluid dispenser tip a substrate. Also described herein are methods and devices for creating a planar surface on a substrate using a substantially unpatterned planar template.