Dynamically adjustable semiconductor metrology system
US9228943B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 26, 2012 |
| Grant date | Jan 5, 2016 |
| Priority date | — |
| Expiry date | Aug 24, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/556
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention may include an illumination source, a detector, a selectably adjustable optical system including a dynamically adjustable illumination pupil of the illumination arm, a dynamically adjustable collection pupil of the collection arm, a dynamically adjustable illumination field stop of the illumination arm, a dynamically adjustable collection field stop of the collection arm, a sensor configured to measure one or more optical characteristics of one or more components of the optical system, and a control system configured to selectably dynamically adjust at least one of the illumination pupil, the collection pupil, the illumination field stop, the collection field stop, and a spectral radiance of the illumination source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.