Printed circuit board multipole for ion focusing

US9230789B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Alexander Laue · Heidenheim, DE
• Albrecht Glasmachers · Wetter, DE
• Christian Hendrich · Aalen, DE
• Dirk Preikszas · Oberkochen, DE
• Michel Aliman · Oberkochen, DE
• Hubert Mantz · Neu-Ulm, DE
• Ulrike Zeile · Heidenheim, DE
• Holger Dömer · Bopfingen, DE

Key dates

• Filing date: Jan 27, 2011
• Grant date: Jan 5, 2016
• Expiry date: Apr 3, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J49/4235
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

An apparatus for focusing and for storage of ions and an apparatus for separation of a first pressure area from a second pressure area are disclosed, in particular for an analysis apparatus for ions. A particle beam device may have at least one of the abovementioned apparatuses. A container for holding ions and at least one multipole unit are provided. The multipole unit has a through-opening with a longitudinal axis as well as a multiplicity of electrodes. A first set of the electrodes is at a first radial distance from the longitudinal axis. A second set of the electrodes is in each case at a second radial distance from the longitudinal axis. The first radial distance is less than the second radial distance. Alternatively or additionally, the apparatus may have an elongated opening with a radial extent. The opening has a longitudinal extent which is greater than the radial extent.