Solid state light source assisted processing
US9232569B2 · kind B2 · utility
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16Claims
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Assignee
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Key dates
| Filing date | Feb 27, 2013 |
| Grant date | Jan 5, 2016 |
| Priority date | — |
| Expiry date | Jan 26, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67115
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Apparatus for providing pulsed or continuous energy in a process chamber are provided herein. The apparatus may include a lamphead including a set of lamps, wherein the first set of lamps are not solid state light sources, and a set of solid state light sources disposed on the lamp head, to provide pulsed or continuous energy to the process chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.