Spread-spectrum MEMS self-test system and method
US9238580B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 11, 2013 |
| Grant date | Jan 19, 2016 |
| Priority date | — |
| Expiry date | Feb 23, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N35/00712
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS sensor includes a micro-electromechanical structure, a detection circuit, and a self-test circuit to test the health of the MEMS sensor during runtime operations. The self-test circuit is configured to inject into the micro-electromechanical structure a plurality of injected test signals that are broad-band frequency-varying frequency signals, which are based on spread spectrum based modulation. The injected test signals may a magnitude that is below an observable threshold of the sensor signal as well as a test-signal bandwidth that overlaps with a substantial portion of the sensor bandwidth, including the stimulus of interest.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.