Probe head assemblies, components thereof, test systems including the same, and methods of operating the same
US9244099B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 3, 2012 |
| Grant date | Jan 26, 2016 |
| Priority date | — |
| Expiry date | Apr 20, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2889
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Probe head assemblies, components of probe head assemblies, test systems including the probe head assemblies and/or components thereof, and methods of operating the same. The probe head assemblies are configured to convey a plurality of test signals to and/or from a device under test and include a space transformer, a contacting assembly, and a riser that spatially separates the space transformer from the contacting assembly and conveys the plurality of test signals between the space transformer and the contacting assembly. The contacting assembly may include a frame that defines an aperture and has a coefficient of thermal expansion that is within a threshold difference of that of the device under test, a flexible dielectric body that is attached to the frame, maintained in tension by the frame, and extends across the aperture, and a plurality of conductive probes. The plurality of conductive probes may include a dual-faceted probe tip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.