Method and system for coherence reduction
US9244290B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 6, 2011 |
| Grant date | Jan 26, 2016 |
| Priority date | — |
| Expiry date | Jul 3, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/20
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical system having coherence reduction capabilities includes a light source for generating a first light pulse; an asymmetrical pulse stretcher arranged to receive the first light pulse and to generate multiple light pulses, during a pulse sequence generation period, wherein the asymmetrical pulse stretcher includes multiple optical components which define a loop and a condenser lens is located between the asymmetrical pulse stretcher and an object, for directing the multiple pulses toward an area on the object At least two optical components of the multiple optical components are positioned in an almost symmetrical manner in relation to each other and introduce a coherence-related difference between at least two pulses of the multiple pulses. The pulse sequence generation period does not exceed a response period of a detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.