System and method for compressed data transmission in a maskless lithography system
US9245714B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 27, 2013 |
| Grant date | Jan 26, 2016 |
| Priority date | — |
| Expiry date | Sep 27, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31789
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Compression, transmission and decompression of gray-tone imagery data includes receiving a gray-tone image suitable for printing at least a portion of a pattern onto a substrate by operation of an electron beam lithography system, aggregating sets of lines of the gray-tone image into trilines, sequentially encoding each of the trilines of the gray-tone image by operation of one or more encoders, the one or more encoders equipped with a codebook configured to store a plurality of triline fragments and a write location and transmitting the encoded trilines of the gray-tone image to a set of decoders of the digital pattern generator via a set of data pathways established between the one or more encoders and each of the decoders.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.