Anti-reflective layer and method
US9245751B2 · kind B2 · utility
3Cited by
92References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 17, 2013 |
| Grant date | Jan 26, 2016 |
| Priority date | — |
| Expiry date | Jan 27, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/31111
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system and method for anti-reflective layers is provided. In an embodiment the anti-reflective layer comprises a floating component in order to form a floating region along a top surface of the anti-reflective layer after the anti-reflective layer has dispersed. The floating component may be a floating cross-linking agent, a floating polymer resin, or a floating catalyst. The floating cross-linking agent, the floating polymer resin, or the floating catalyst may comprise a fluorine atom.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.