Patent · US Active

Semiconductor device

US9246001B2 · kind B2 · utility

11Cited by
14References
1Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 29, 2015
Grant dateJan 26, 2016
Priority date
Expiry dateApr 29, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/665
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes a fin-shaped semiconductor layer on a semiconductor substrate and extends in a first direction with a first insulating film around the fin-shaped semiconductor layer. A pillar-shaped semiconductor layer resides on the fin-shaped semiconductor layer. A width of the pillar-shaped semiconductor layer, perpendicular to the first direction is equal to a width of the fin-shaped semiconductor layer perpendicular to the first direction. A gate insulating film is around the pillar-shaped semiconductor layer and a metal gate electrode is around the gate insulating film. A metal gate line extends in a second direction perpendicular to the first direction of the fin-shaped semiconductor layer and is connected to the metal gate electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.